Rotating Target Holder
The OS Rotating Target Holder (OS-TH) allows the correct positioning of the target material during ablation.
The target rotation allows a better uniformity consumption of the target. The device can be adjusted (x, y) by external knobs to allow optimal target positioning. A DN16CF port allows to introduce processing gas in the vicinity of the target during ablation. The electrical layout of the OS-TH has been especially designed to operate in presence of plasma.
The OS-TH uses ceramic ball bearings and high voltage grounding element
|Target Dimensions||30mm diameter (max)|
|Connecting Flange||UHV DN40CF|
|Power Transmission||by magnetical rotary feedthrough|
|Rotating Speed (adjustable)||up to 20rpm|
|Z Axis (adjustable)||50mm (optional)|
|Adjustable X, Y Tilting of the Target||up to +/- 6°|
|Flange for the Gas Inlet||UHV DN16CF|