RF Plasma Cleaner
The OS Radio Frequency Plasma Cleaner (OS-RFPC) is especially designed to operate in the Load-Lock (OS-LL) unit. Samples introduced in the fast entry lock of the OS-LL may be conveniently treated by a RF Plasma in order to give a final cleaning in situ.
|13.56 MHz quartz controlled
|220 V ac 50-60 Hz
|Generator 230x230x130 / converter 80x50x40