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The OS Radio Frequency Plasma Cleaner (OS-RFPC) is especially designed to operate in the Load-Lock (OS-LL) unit. Samples introduced in the fast entry lock of the OS-LL may be conveniently treated by a RF Plasma in order to give a final cleaning in situ.

Characteristics

RF Power	25W
Frequency	13.56 MHz quartz controlled
Harmonic Content	+30dB
Output Connector	BNC female
Power Requirements	220 V ac 50-60 Hz
Dimensions (mm)	Generator 230x230x130 / converter 80x50x40