RF Plasma Cleaner
The OS Radio Frequency Plasma Cleaner (OS-RFPC) is especially designed to operate in the Load-Lock (OS-LL) unit. Samples introduced in the fast entry lock of the OS-LL may be conveniently treated by a RF Plasma in order to give a final cleaning in situ.
|Frequency||13.56 MHz quartz controlled|
|Output Connector||BNC female|
|Power Requirements||220 V ac 50-60 Hz|
|Dimensions (mm)||Generator 230x230x130 / converter 80x50x40|