Load Lock System
The OS Load Lock (OS-LL) is especially designed for the use in connection with the standard OS PPD deposition system (Twin Spark PPD system) allowing to transfer samples up to 2 mcm diameter to the deposition system and is connected to a CF100 flange by a gate valve. It is equipped with a 1000 mm magnetic translator, a port-aligner, a fast 100 mm diameter entry door for inserting samples, lamp, inspection window, roughening valve, gas inlet valve and pressure gauges. A CF40 flange provides the port for optional installation of the Radio Frequency Plasma Cleaning antenna (OS-RFPLCL) designed by OS for the OS-LL. The OS-RFPLCL unit (optional) is equipped with a specially designed power supply.
|Dimensions||100 mm diameter, 270 mm length|
|Connecting flange||UHV DN100CF|
|Magnetic translator||1000 mm length and port aligner|
|Inspection viewport||UHV DN63CF|
|Fast-entry door||UHV DN100 ISO K|
|Plasma Cleaning Unit (optional)||UHV DN40CF port and power supply|
|Extra blank flange||UHV DN40CF|
* An RF noise shielded PC is recommended for the use in connection with a PPD System.