Load Lock System
Accessories
The OS Load Lock (OS-LL) is especially designed for the use in connection with the standard OS PPD deposition system (Twin Spark PPD system) allowing to transfer samples up to 2 mcm diameter to the deposition system and is connected to a CF100 flange by a gate valve. It is equipped with a 1000 mm magnetic translator, a port-aligner, a fast 100 mm diameter entry door for inserting samples, lamp, inspection window, roughening valve, gas inlet valve and pressure gauges. A CF40 flange provides the port for optional installation of the Radio Frequency Plasma Cleaning antenna (OS-RFPLCL) designed by OS for the OS-LL. The OS-RFPLCL unit (optional) is equipped with a specially designed power supply.
Characteristics
Dimensions | 100 mm diameter, 270 mm length |
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Connecting flange | UHV DN100CF |
Magnetic translator | 1000 mm length and port aligner |
Inspection viewport | UHV DN63CF |
Fast-entry door | UHV DN100 ISO K |
Pressure gauge | Pirani |
Plasma Cleaning Unit (optional) | UHV DN40CF port and power supply |
Extra blank flange | UHV DN40CF |
* An RF noise shielded PC is recommended for the use in connection with a PPD System.