Heated Sample Holder
The OS Sample Holder (OS-SH2H) has been especially designed to operate in association with the PPD Guns in a ultra high vacuum environment.
It consists in a rotating magnetic feedthrough which allows uniform deposition on the sample.
The OS-SH2H is installed on a CF63 flange and embeds a quartz halogen lamp heating unit compatible with the operation gas environment partial pressure allowing sample temperature to reach up to 950° with extremely low heat outflow in the surroundings.
The OS-SH2S is equipped with a thermocouple temperature control unit. A z-linear translator allows adjustment of the sample-target distance. The heater is provided by halogen lamps and is therefore oxygen resistant.
|Substrate Temperature||up to 950° for 40mm diameter Sample Holder||up to 800° for 2" diameter Sample Holder|
|Sample Dimensions||up to 2” diameter|
|Connecting Flange||UHV DN63CF|
|Power Transmission||by magnetical rotary feedthrough|
|Rotational Speed (adjustable)||up to 6 rpm|
|Z Axis (adjustable)||100mm|