Heated Sample Holder
Accessories
The OS Sample Holder (OS-SH2H) has been especially designed to operate in association with the PPD Guns in a ultra high vacuum environment.
It consists in a rotating magnetic feedthrough which allows uniform deposition on the sample.
The OS-SH2H is installed on a CF63 flange and embeds a quartz halogen lamp heating unit compatible with the operation gas environment partial pressure allowing sample temperature to reach up to 950° with extremely low heat outflow in the surroundings.
The OS-SH2S is equipped with a thermocouple temperature control unit. A z-linear translator allows adjustment of the sample-target distance. The heater is provided by halogen lamps and is therefore oxygen resistant.
Characteristics
Substrate Temperature | up to 950° for 40mm diameter Sample Holder | up to 800° for 2" diameter Sample Holder |
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Sample Dimensions | up to 2” diameter | |
Connecting Flange | UHV DN63CF | |
Power Transmission | by magnetical rotary feedthrough | |
Rotational Speed (adjustable) | up to 6 rpm | |
Z Axis (adjustable) | 100mm |