Rotating Target Holder
Accessories
The OS Rotating Target Holder (OS-TH) allows the correct positioning of the target material during ablation.
The target rotation allows a better uniformity consumption of the target. The device can be adjusted (x, y) by external knobs to allow optimal target positioning. A DN16CF port allows to introduce processing gas in the vicinity of the target during ablation. The electrical layout of the OS-TH has been especially designed to operate in presence of plasma.
The OS-TH uses ceramic ball bearings and high voltage grounding element
Characteristics
Target Dimensions | 30mm diameter (max) |
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Connecting Flange | UHV DN40CF |
Power Transmission | by magnetical rotary feedthrough |
Rotating Speed (adjustable) | up to 20rpm |
Z Axis (adjustable) | 50mm (optional) |
Adjustable X, Y Tilting of the Target | up to +/- 6° |
Flange for the Gas Inlet | UHV DN16CF |